By Oleg A. Popov
Content material:
Preface
, Pages vii-xii, Oleg A. Popov
Contributors
, Pages xiii-xiv
1 - Helicon Plasma Sources
, Pages 1-75, Francis F. Chen
2 - Planar Inductive Sources
, Pages 76-99, John C. Forster, John H. Keller
3 - Electrostatically-Shielded Inductively-Coupled RF Plasma Sources
, Pages 100-148, Wayne L. Johnson
4 - Very excessive Frequency Capacitive Plasma Sources
, Pages 149-190, Michael J. Colgan, M. Meyyappan
5 - floor Wave Plasma Sources
, Pages 191-250, Michel Moisan, Joëlle Margot, Zenon Zakrzewski
6 - Microwave Plasma Disk Processing Machines
, Pages 251-311, Jes Asmussen
7 - Electron Cyclotron Resonance Plasma Sources
, Pages 312-379, James E. Stevens
8 - allotted ECR Plasma Sources
, Pages 380-425, Jacques Pelletier
Index
, Pages 426-445
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Additional info for High Density Plasma Sources. Design, Physics and Performance
Sample text
1 ....... r-, r-, -- -, " .... , .... _~-- <, 0,2 -.. 4 rI a Figure 14. (Cant'd) -'_. 303 ~ --8z ........ ,..... ....... .. .. _-- m = -1, P rabol c " r-, '<. -- - 7 r--- _ lL: -- . 8 ....... ·J8r ----'-Bth Helicon Plasma Sources m=+1 29 m =-1 Figure 15. P>' 05 S, I m= 1 '. 4 ~ 03 €" / ~V ..!! ~ ....... 0 ~ t--- r---- t---... r---- --;-- r---- t--. 2 04 06 .. 2 1,<-. /' ....... ~ <, ,~ t---.. 0 ~ t::--: ~ t . 1 --21 "'" " .. 8 r/ a Figure 16. 35] Other values are as in Fig 14. = +l 30 High Density Plasma Sources 35 30 25 20 ~ 15 10 / ~ /~ L~ ---+-- m=·1 -0----- /~ I~ ~)- m=Q -+---- m= 1 5 w o o 2 4 6 t, fors 8 10 =2 Figure 17.
50) cdi; = (im/rlb, + ikAB() Eq. (51) Here, A is a quantity which is unity except for the displacement current correction. The term B, can be eliminated from Eq. 50 by V· B = 0, yielding Eq. (52) Be, To obtain we multiply Eq. 50 by r and differentiate, then substitute the resulting Bz' into Eq. 51. Using Eq. 52 for B(), we obtain, after simplification, the following equation for Br : Eq. (53) B "+( 1+ r 2 2(2ma-kA)]B 2m2 )B' mra a' - r-2 ( a 2 -k 2,F ) - m + kr -'-- [ m2 + -m? + Ak2 r2 r kA a A m?
At the boundary, however, E must be planepolarized in order to be normal to the wall. At r = 0, Eq. 21 shows that B R and BL both vanish for Iml -:f::- 1; but for Iml = 1, those components proportional to Jo(Tr) remain finite. There, the m = 1 mode has B R only, while the m = -1 mode has BL only, regardless of the sign of k. Figure 10. Schematic of a right-hand helical antenna. Figure 11. Schematic of a left-hand helical antenna. Helicon Plasma Sources 23 Figure 12. Schematic of a Boswell-type paddle-shaped antenna.