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By W. Umrath

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32 Mean gas velocity vg during compression without purge gas (left) and with purge gas (right) in stages 2, 3 and 4 Vacuum generation • Losses in pumping speed and a reduction in ultimate pressure can be kept very small due to the special way in which the gas is made to pass through the pump. 2 Purge gas flow Claw pumps without internal compression for chemistry applications (“ALL·ex” ) Fig. 33 Ultimate pressure of the DRYVAC 100S as a function of pure gas flow in stages 2 Ð 4 depositing particles in the operating chamber of the pump and the resulting impairment increases with increasing pressure.

Quite generally, diffusion pumps have a higher pumping speed for lighter gases compared to heavier gases. To characterize the effectiveness of a diffusion pump, the so called HO factor is defined. This is the ratio of the actually obtained specific pumping speed to the theoretical maximum possible specific pumping speed. 55 for the larger pumps). The various oil diffusion pumps manufactured by LEYBOLD differ in the following design features (see Fig. 45 a and b). 42 1 2 a) LEYBODIFF-Pump with fractionating facility 1 Center 2 Middle section 3 Outer part of the boiler (fractionation) b) DI pump; side view on to the internal heater 1 Thermostat sensor 2 Heating cartridge Fig.

Since greater pressure differences are allowed more installed power is needed, which at the given speed and the pressure difference between inlet and discharge port is directly proportional and is composed of the theoretical work done on compression and various power losses. The compression process ends normally after opening of the pumping chamber in the direction of the discharge port. At this moment warmed gas at higher pressure flows into the pumping chamber and compresses the transported volume of gas.

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